FEM SIMULATION OF PIEZORESISTIVE PRESSURE MODULE
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
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ژورنال
عنوان ژورنال: Sensor Electronics and Microsystem Technologies
سال: 2010
ISSN: 2415-3508,1815-7459
DOI: 10.18524/1815-7459.2010.4.116319